{dede:field name='position'/}
 

摆镜平台

产品详情
产品参数

Mechanical Properties
blocking torque MB

2.1 Ncm

max. normal force FN

1.5 N

max. radial force FXY

2.5 N

positioner dimension

Ø 50 mm x 35 mm

weight

≈ 120 g

 
Closed-Loop with Nanosensor (-S)
sensor resolution

0.1 μrad / 1 nm

closed-loop resolution

0.2 μrad / 2 nm

 
Materials and Vacuum Options 1
-HV (10-6 mbar), -UHV / -UHVT (10-11 mbar)
Positioning
travel

± 25 °
10 mm

step width

6 – 150 μrad
50 – 1300 nm

scan range

140 μrad
1.3 μm

scan resolution

< 0.1 μrad
< 1 nm

velocity

30 °/s
10 mm/s