北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| blocking force FB |
> 5 N |
| max. normal force FN |
30 N |
| max. lift force FL |
> 1.5 N |
| carriage dimension |
54.8 x 60 x 16 mm3 |
| weight of carriage |
148 g |
| weight of rail |
286 g / 100 mm |
| pitch torque MP |
25 Nm |
| yaw torque MY |
25 Nm |
| roll torque MR |
90 Nm |
| rail length |
70 .. 1480 mm |
| step width |
1 – 1,500 nm 1 |
| scan range |
> 3 µm |
| scan resolution |
< 1 nm |
| velocity |
> 20 mm/s |
| max. frequency |
18.5 kHz |
| sensor resolution |
1 nm |
| repeatability |
± 70 .. 450 nm 2 |
