{dede:field name='position'/}
 

单轴平台

产品详情
产品参数

Mechanical Properties
max. normal force FN

5 N

max. lift force FL

5 N

positioner dimension

100 x 140 x 40 mm3

weight

650 g

Positioning
travel

± 5 (10) mm

step width

1 – 150 nm

scan range

> 500 µm

scan resolution

< 1 nm

velocity

> 5 mm/s

max. frequency

10 kHz

 
Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 100 nm 1