SmarPod 70.42

产品详情
产品参数

Mechanical Properties
max. vertical load FV

5 N

max. horizontal force FH

2.5 N

positioner dimension

Ø 70 x 42 mm3

weight

≈ 300 g


Travel Ranges
x

10 mm

y

10 mm

z

5 mm


Θx

14 °

Θy

16 °

Θz

28 °

 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm