SmarPod 115.25

产品详情
产品参数

Mechanical Properties
max. vertical load FV

2.5 N

max. horizontal force FH

1.25 N

positioner dimension

115 x 101.4 x 25 mm3

weight

≈ 400 g














Travel Ranges
x

11 mm

y

11 mm

z

5 mm


Θx

18 °

Θy

20 °

Θz

37 °











Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm