SmarPod 110.45

产品详情
产品参数

Mechanical Properties
max. vertical load FV

5 N

max. horizontal force FH

2.5 N

positioner dimension

Ø 110 x 45 mm3

weight

≈ 400 g


Travel Ranges
x

20 mm

y

20 mm

z

11 mm


Θx

21 °

Θy

24 °

Θz

38 °

 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm