SmarPod 225.75

产品详情
产品参数

Mechanical Properties
max. vertical load FV

10 N

max. horizontal force FH

5 N

positioner dimension

Ø 225 x 75 mm

weight

≈ 1000 g


Travel Ranges
x

41 mm

y

41 mm

z

21 mm


Θx

20 °

Θy

23 °

Θz

41 °











Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm