SmarPod P-SLC-17

产品详情
产品参数

Mechanical Properties 1
max. vertical load FV

5 N

max. horizontal force FH

2.5 N

positioner dimension

> 110 x 80 x 67 mm3

weight

≈ 200 .. 1000 g


Travel Ranges
x

48 mm

y

28 .. 48 mm

z

≤ 9 mm


Θx

≤ 28 °

Θy

≤ 26 °

Θz

≤ 20 °

 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 2 (x,y,z)

± 200 nm

repeatability for full travel range 2 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 2 (x,y,z)

± 15 nm