SmarPod P-SLC-24

产品详情
产品参数

Mechanical Properties 1
max. vertical load FV

10 N

max. horizontal force FH

5 N

positioner dimension

> 110 x 90 x 68 mm3

weight

≈ 300 .. 2000 g


Travel Ranges
x

79 .. 119 mm

y

45 .. 119 mm

z

≤ 12 mm


Θx

≤ 31 °

Θy

≤ 27 °

Θz

≤ 42 °











Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 2 (x,y,z)

± 200 nm

repeatability for full travel range 2 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 2 (x,y,z)

± 15 nm