SmarPod Wafer 200

产品详情
产品参数

Mechanical Properties
max. vertical load FV

20 N

positioner dimension

420 x 430 x 93 mm3

weight

≈ 11 kg


Travel Ranges
x

200 mm

y

200 mm

z

10 mm


Θx

6 °

Θy

7 °

Θz

24 °

 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm

smallest increment (Θx,y,z)

1 µrad

repeatability for full travel range 1 (x,y,z)

± 200 nm

repeatability for full travel range 1 (Θx,y,z)

± 10 µrad

repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm