北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| max. vertical load FV |
20 N |
| positioner dimension |
420 x 430 x 93 mm3 |
| weight |
≈ 11 kg |
| x |
200 mm |
| y |
200 mm |
| z |
10 mm |
| Θx |
6 ° |
| Θy |
7 ° |
| Θz |
24 ° |
| smallest increment (x,y,z) |
1 nm |
| smallest increment (Θx,y,z) |
1 µrad |
| repeatability for full travel range 1 (x,y,z) |
± 200 nm |
| repeatability for full travel range 1 (Θx,y,z) |
± 10 µrad |
| repeatability for 1 mm travel range 1 (x,y,z) |
± 15 nm |
