北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
机械位移平台
| Travel | Scan Axis | 350 mm , 500 mm, |
| Step Axis | 350 mm , 500 mm | |
| Drive System | Linear Brushless Motor | |
| Resolution | 0.25 nm | |
| Accuracy | ±300 nm | |
| Repeatability（choose linear driver） | ±100 nm (±50 nm) | |
| XYZ Position Stability（Air On） | 20 nm | |
| Granite Bass Thickness | 250 mm | |
| Rated Payload(Maintaining Dynamic Specifications) | 5 kg | |
| Maximum Payload | 25 kg | |
| Maximum Velocity with Rated Payload | Scan & Step Axis | 1000 mm/s |
| Peak Acceleration with Rated Payload | Scan & Step Axis | 2 G (20 m/s2) |
| RMS Acceleration with Rated Load | Scan & Step Axis | 1 G (10 m/s2) |
| Stiffness,First Natural Frequency with Rated Payload | >100 Hz | |
| Pitch | 2 arc sec | |
| Roll | 2 arc sec | |
| Yaw | 2 arc sec | |
| XY straightness | 1 um | |
| XY Flatness | 1.2 um | |
| XY Orthogonality | <2 arc sec | |
| Velocity ripple( sampled at 400mm/s) | 0.1 % | |
| MTBF | 40,000 hours | |
