北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
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| Kinematics & Feedback information | |||
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Active Axes |
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X,Y |
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Travel range |
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120 x 120 mm |
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Encoder Type |
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Optical |
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Encoder Model |
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Len1 |
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Encoder Resolution |
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any of the range: 25 nm to 5 µm (on demand) |
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Encoder Interface |
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Differential RS422 |
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Internal Multiplier |
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YES |
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1) Multiplication factor |
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4-200 (on demand) |
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Encoder Grating Period |
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20 µm |
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Reference Mark (Index) |
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YES |
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2) Absolute Accuracy |
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before calibration |
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±4.00 µm |
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after calibration |
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± 0.5 µm |
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Uni-Directional Repeatability |
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N/A |
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2) Bi-Directional Repeatability (peak to peak) |
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±0.15 µm |
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2) Bi-Directional Repeatability (RMS) |
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±0.10 µm |
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3) Pitch, µrad / arcsec |
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±30 / ±6.20 |
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3) Yaw, µrad / arcsec |
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±30 / ±6.20 |
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Roll |
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N/A |
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4) Maximum Velocity (load 4kg) |
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<1000 mm/s |
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5) Maximum Acceleration (load 4kg) |
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<20000 mm/s2 |
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Limits Switches Type (Safety) |
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Optical (Optrons) |
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Limit Switch Polarity (Safety) |
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Pushed is closed |
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Limit Switch Voltage |
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5…24 V |
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| Load, Guiding & Transmission Information | |||
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Design Type |
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Linear Motor Stage; Planar Design |
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Linear Motor Model |
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LM3 |
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Linear Motor Design Type |
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Ironless BLDC motor |
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Maximum Bus Voltage |
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>300 VDC |
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6) Load Capacity (Centrally Placed) |
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30 kg |
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7) Moving Mass X |
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3.00 kg |
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7) Moving Mass Y |
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8.50 kg |
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Guiding System |
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Crossed roller bearings with cage drift protection |
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| Material And Environment Conditions | |||
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Housing Material |
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Aluminum Alloy |
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Housing Coating (Finish) |
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Black Anodizing |
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Environment pressure |
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Normal Atmosphere |
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Operating Temperature |
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20±2, °C |
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| Control, Communication & Cabling | |||
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8) Recommended controllers |
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ACS Products Line or 8SMC5-USB series |
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8) Recommended drivers |
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ACS Product Line or 8SMC5-USB series |
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9) Recommended power supply |
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2 phase / 3 phase source |
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12) Recommended communication interface |
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EtherCAT / RS232 / USB / TCP-IP |
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Cable Length |
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2 m (other by request) |
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10) Differential Outputs |
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Optionally available by request |
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| Additional Details | |||
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Dimensions of Moving Platform |
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240 x 240 mm (W x L) |
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Stage Dimensions |
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240 x 360 x 75 mm (W x L x H) |
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Measurement System |
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Metric/Imperial |
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11) Orthogonality, µrad / arcsec |
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24 / 5 |
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13)Protection Level |
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Basic |
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RoHS |
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Compliant |
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Weight |
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12.5 kg |
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