VAL II

产品详情
VAL系列运动平台是XiviTech一款面向高精度、高端应用市场的气浮直线平台。凭借研发团队在材料、设计、分析方面的专业技术对平台整体进行不断设计优化,采用非接触的气浮轴承与磁预载的结构,实现无摩擦的平滑运动,使VAL系列运动平台达到亚微米至纳米级的定位精度及重复定位精度。
产品参数

VAL II的优点:
1、磁预载气浮轴承
2、高速度稳定性
3、行程可达1m
4、直线编码器反馈
5、低噪音无摩擦

6、高动态特性

Basic Model VALII100 VALII200 VALII300 VALII400 VALII500 VALII600 VALII800 VALII1000
Total Travel 100 mm           200 mm         300 mm        400 mm         500 mm        600 mm         800 mm         1000mm        
Motor Type Brushless Linear Sevomotor
Feedback Noncontact Linear Encoder or Laser Interferometer
Encoder Noncontact Linear Encoder   0.001 µm - 0.1 µm
Laser Interferometer 0.39 nm - 79 nm
Maximum Velocity (no-load) 2 m/s
Peak Acceleration(no-load) 20 m/s2
Maximum Load Capacity 50 kg
Accuracy Noncontact Linear Encoder(with error compensation,temperature stabilized within 0.2°C)   ±0.3 µm ±0.4 µm ±0.6 µm ±1 µm
Repeatability  ±0.2 µm  ±0.3 µm     ±0.4 µm   
Straightness & Flatness  ±0.25 µm        ±0.4 µm        ±0.75 µm        ±1.5 µm        ±2.0 µm          ±3.0 µm          ±4.0 µm          ±5.0 µm        
Pitch/Yaw 1 arc sec 2 arc sec 3 arc sec 4 arc sec 5 arc sec 6 arc sec 8 arc sec 10 arc sec
Velocity ripple 0.1% @ 500 mm/s
Minimum incremental motion 10 nm
Nominal Stage Mass 30 kg            35 kg            40 kg            45 kg            50 kg            55 kg               65 kg               75 kg              
Moving Mass 8.5 kg
Operating Pressure 0.5 MPa ± 0.05 MPa
Air Consumption 0.8 SCFM
Moving Mass 8.5 kg
Material Aluminum
MTBF 20,000 hrs