VML165

产品详情
无铁芯直线电机直驱 高质量长寿命机械导轨 侧面密封 低成本高性能 多规格多行程选择 应用:工业或科研,如计量、平板显示器制造等。
产品参数

VML165
无铁芯直线电机直驱
高质量长寿命机械导轨
侧面密封
低成本高性能
多规格多行程选择
应用:工业或科研,如计量、平板显示器制造等。
Mechanical Specifications  165-100  165-150  165-200  165-250
Travel 100 mm 150 mm 200 mm 250 mm
Calibrated Accuracy ±1 µm ±1 µm ±1.5 µm ±1.5 µm
Resolution  1 nm – 10 nm   1 nm – 10 nm   1 nm – 10 nm   1 nm – 10 nm
Repeatability (Bi-Directional)  ±0.5 µm ±0.5 µm  ±0.5 µm ±0.5 µm
Straightness & Flatness  ±2.5 µm  ±3 µm  ±4.5 µm  ±5 µm
Pitchc & Yaw 6 arc sec 7 arc sec 9 arc sec 10 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 30 m/s2
Maximum Force (Continuous) 70 N
Load Capacity  Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 10 kg 11 kg 12 kg 13 kg
Material Aluminum
MTBF  20,000 hrs





Mechanical Specifications  165-300  165-400  165-500 165-600
Travel 300 mm 400 mm 500 mm 600 mm
Calibrated Accuracy ±1.5 µm ±1.5 µm ±2 µm ±2 µm
Resolution  1 nm – 10 nm 1 nm – 10 nm  1 nm – 10 nm  1 nm – 10 nm
Repeatability (Bi-Directional)  ±0.5 µm  ±0.5 µm  ±0.5 µm ±0.5 µm
Straightness & Flatness  ±6 µm  ±8 µm  ±9 µm  ±10 µm
Pitch & Yaw 12 arc sec 15 arc sec 17arc sec 19 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 30 m/s2
Maximum Force (Continuous) 70 N
Load Capacity  Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 14 kg 16 kg 18 kg 20 kg
Material Aluminum
MTBF(Mean Time Between Failure)  20,000 hrs