VML190
无铁芯直线电机直驱
高质量长寿命机械导轨
侧面密封
低成本高性能
多规格多行程选择
应用：工业或科研，如计量、平板显示器制造等。

Mechanical Specifications		190-100	190-150	190-200	190-250
Travel		100 mm	150 mm	200 mm	250 mm
Calibrated Accuracy		±1 µm	±1 µm	±1 µm	±1 µm
Resolution		1 nm – 10 nm	1 nm – 10 nm	1 nm – 10 nm	1 nm – 10 nm
Repeatability (Bi-Directional)		±0.4 µm	±0.4 µm	±0.4 µm	±0.4 µm
Straightness & Flatness		±1.5 µm	±2 µm	±2.5 µm	±3 µm
Pitch & Yaw		6 arc sec	7 arc sec	8.5 arc sec	9.5 arc sec
Maximum Speed		2 m/s
Maximum Acceleration		3 g
Maximum Force (Continuous)		100 N
Load Capacity	Horizontal	60 kg
	Side	60 kg
Moving Mass		4.5 kg
Stage Mass		14.5 kg	16 kg	17 kg	18 kg
Material		Aluminum
MTBF		20,000 hrs

Mechanical Specifications		190-300	190-400	190-500	190-600
Travel		300 mm	400 mm	500 mm	600 mm
Calibrated Accuracy		±1 µm	±1 µm	±1 µm	±1 µm
Resolution		1 nm – 10 nm	1 nm – 10 nm	1 nm – 10 nm	1 nm – 10 nm
Repeatability (Bi-Directional)		±0.5 µm	±0.5 µm	±0.5 µm	±0.5 µm
Straightness & Flatness		±4 µm	±5 µm	±6 µm	±6.5 µm
Pitch & Yaw		11 arc sec	12.5 arc sec	15 arc sec	17 arc sec
Maximum Speed		2 m/s
Maximum Acceleration		30 m/s2
Maximum Force (Continuous)		100 N
Load Capacity	Horizontal	60 kg
	Side	60 kg
Moving Mass		4.5 kg
Stage Mass		20 kg	22 kg	25 kg	27 kg
Material		Aluminum
MTBF		20,000 hrs

Mechanical Specifications		190-800	190-1000
Travel		800 mm	1000 mm
Calibrated Accuracy		±1.5 µm	±1.5 µm
Resolution		1 nm – 10 nm	1 nm – 10 nm
Repeatability (Bi-Directional)		±0.5 µm	±0.5 µm
Straightness & Flatness		±8 µm	±10 µm
Pitch & Yaw		19 arc sec	22.5 arc sec
Maximum Speed		2 m/s
Maximum Acceleration		30 m/s2
Maximum Force (Continuous)		100 N
Load Capacity	Horizontal	60 kg
	Side	60 kg
Moving Mass		4.5 kg
Stage Mass		32 kg	36 kg
Material		Aluminum
MTBF		20,000 hrs