VML190

产品详情
无铁芯直线电机直驱 高质量长寿命机械导轨 侧面密封 低成本高性能 多规格多行程选择 应用:工业或科研,如计量、平板显示器制造等。
产品参数

VML190
无铁芯直线电机直驱
高质量长寿命机械导轨
侧面密封
低成本高性能
多规格多行程选择
应用:工业或科研,如计量、平板显示器制造等。
Mechanical Specifications 190-100 190-150 190-200 190-250
Travel 100 mm 150 mm 200 mm 250 mm
Calibrated Accuracy ±1 µm ±1 µm ±1 µm ±1 µm
Resolution  1 nm – 10 nm   1 nm – 10 nm   1 nm – 10 nm   1 nm – 10 nm
Repeatability (Bi-Directional)  ±0.4 µm ±0.4 µm  ±0.4 µm ±0.4 µm
Straightness & Flatness  ±1.5 µm  ±2 µm  ±2.5 µm  ±3 µm
Pitch & Yaw 6 arc sec 7 arc sec 8.5 arc sec 9.5 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 3 g
Maximum Force (Continuous) 100 N
Load Capacity  Horizontal 60 kg
Side 60 kg
Moving Mass 4.5 kg
Stage Mass 14.5 kg 16 kg 17 kg 18 kg
Material Aluminum
MTBF  20,000 hrs


Mechanical Specifications  190-300   190-400   190-500 190-600
Travel 300 mm 400 mm 500 mm 600 mm
Calibrated Accuracy ±1 µm ±1 µm ±1 µm ±1 µm
Resolution  1 nm – 10 nm 1 nm – 10 nm  1 nm – 10 nm  1 nm – 10 nm
Repeatability (Bi-Directional)  ±0.5 µm  ±0.5 µm  ±0.5 µm ±0.5 µm
Straightness & Flatness  ±4 µm  ±5 µm  ±6 µm  ±6.5 µm
Pitch & Yaw 11 arc sec 12.5 arc sec 15 arc sec 17 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 30 m/s2
Maximum Force (Continuous) 100 N
Load Capacity  Horizontal 60 kg
Side 60 kg
Moving Mass 4.5 kg
Stage Mass 20 kg 22 kg 25 kg 27 kg
Material Aluminum
MTBF  20,000 hrs


Mechanical Specifications  190-800  190-1000
Travel 800 mm 1000 mm
Calibrated Accuracy ±1.5 µm ±1.5 µm
Resolution 1 nm – 10 nm 1 nm – 10 nm
Repeatability (Bi-Directional)  ±0.5 µm ±0.5 µm
Straightness & Flatness  ±8 µm  ±10 µm
Pitch & Yaw 19 arc sec 22.5 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 30 m/s2
Maximum Force (Continuous) 100 N
Load Capacity  Horizontal 60 kg
Side 60 kg
Moving Mass 4.5 kg
Stage Mass 32 kg 36 kg
Material Aluminum
MTBF  20,000 hrs