
北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
Mechanical Specifications | 190-100 | 190-150 | 190-200 | 190-250 | ||
Travel | 100 mm | 150 mm | 200 mm | 250 mm | ||
Calibrated Accuracy | ±1 µm | ±1 µm | ±1 µm | ±1 µm | ||
Resolution | 1 nm – 10 nm | 1 nm – 10 nm | 1 nm – 10 nm | 1 nm – 10 nm | ||
Repeatability (Bi-Directional) | ±0.4 µm | ±0.4 µm | ±0.4 µm | ±0.4 µm | ||
Straightness & Flatness | ±1.5 µm | ±2 µm | ±2.5 µm | ±3 µm | ||
Pitch & Yaw | 6 arc sec | 7 arc sec | 8.5 arc sec | 9.5 arc sec | ||
Maximum Speed | 2 m/s | |||||
Maximum Acceleration | 3 g | |||||
Maximum Force (Continuous) | 100 N | |||||
Load Capacity | Horizontal | 60 kg | ||||
Side | 60 kg | |||||
Moving Mass | 4.5 kg | |||||
Stage Mass | 14.5 kg | 16 kg | 17 kg | 18 kg | ||
Material | Aluminum | |||||
MTBF | 20,000 hrs |
Mechanical Specifications | 190-300 | 190-400 | 190-500 | 190-600 | |
Travel | 300 mm | 400 mm | 500 mm | 600 mm | |
Calibrated Accuracy | ±1 µm | ±1 µm | ±1 µm | ±1 µm | |
Resolution | 1 nm – 10 nm | 1 nm – 10 nm | 1 nm – 10 nm | 1 nm – 10 nm | |
Repeatability (Bi-Directional) | ±0.5 µm | ±0.5 µm | ±0.5 µm | ±0.5 µm | |
Straightness & Flatness | ±4 µm | ±5 µm | ±6 µm | ±6.5 µm | |
Pitch & Yaw | 11 arc sec | 12.5 arc sec | 15 arc sec | 17 arc sec | |
Maximum Speed | 2 m/s | ||||
Maximum Acceleration | 30 m/s2 | ||||
Maximum Force (Continuous) | 100 N | ||||
Load Capacity | Horizontal | 60 kg | |||
Side | 60 kg | ||||
Moving Mass | 4.5 kg | ||||
Stage Mass | 20 kg | 22 kg | 25 kg | 27 kg | |
Material | Aluminum | ||||
MTBF | 20,000 hrs |
Mechanical Specifications | 190-800 | 190-1000 | |
Travel | 800 mm | 1000 mm | |
Calibrated Accuracy | ±1.5 µm | ±1.5 µm | |
Resolution | 1 nm – 10 nm | 1 nm – 10 nm | |
Repeatability (Bi-Directional) | ±0.5 µm | ±0.5 µm | |
Straightness & Flatness | ±8 µm | ±10 µm | |
Pitch & Yaw | 19 arc sec | 22.5 arc sec | |
Maximum Speed | 2 m/s | ||
Maximum Acceleration | 30 m/s2 | ||
Maximum Force (Continuous) | 100 N | ||
Load Capacity | Horizontal | 60 kg | |
Side | 60 kg | ||
Moving Mass | 4.5 kg | ||
Stage Mass | 32 kg | 36 kg | |
Material | Aluminum | ||
MTBF | 20,000 hrs |