
北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
Mechanical Specifications | 225-100 | 225-150 | 225-200 | 225-250 | ||||
Travel | 100 mm | 150 mm | 200 mm | 250 mm | ||||
Calibrated Accuracy | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ||||
Resolution | 1 nm – 100 nm | 1 nm – 100 nm | 1 nm – 100 nm | 1 nm – 100 nm | ||||
Repeatability (Bi-Directional) | ±0.4 um | ±0.4 um | ±0.4 um | ±0.4 um | ||||
Straightness & Flatness | ±1.5 μm | ±2 μm | ±2.5 μm | ±3 μm | ||||
Pitch & Yaw | 5.5 arc sec | 6 arc sec | 8 arc sec | 9 arc sec | ||||
Maximum Speed | 2 m/s | |||||||
Maximum Acceleration | 30 m/s2 | |||||||
Maximum Force (Continuous) | 150 N | |||||||
Load Capacity | Horizontal | 100 kg | ||||||
Side | 100 kg | |||||||
Moving Mass | 8 kg | |||||||
Stage Mass | 24 kg | 25.5 kg | 27 kg | 28.5 kg | ||||
Material | Aluminum | |||||||
MTBF | 20,000 hrs |
Mechanical Specifications | 225-300 | 225-400 | 225-500 | 225- 600 | ||
Travel | 300 mm | 400 mm | 500 mm | 600 mm | ||
Calibrated Accuracy | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ||
Resolution | 1 nm – 100 nm | |||||
Repeatability (Bi-Directional) | ±0.4 um | ±0.4 um | ±0.4 um | ±0.4 um | ||
Straightness & Flatness | ±3.5 μm | ±4.5 μm | ±5.5 μm | ±6.5 μm | ||
Pitch & Yaw | 11 arc sec | 13 arc sec | 15 arc sec | 16.5 arc sec | ||
Maximum Speed | 2 m/s | |||||
Maximum Acceleration | 30 m/s2 | |||||
Maximum Force (Continuous) | 150 N | |||||
Load Capacity | Horizontal | 100 kg | ||||
Side | 100 kg | |||||
Moving Mass | 8 kg | |||||
Stage Mass | 30 kg | 33 kg | 36 kg | 39 kg | ||
Material | Aluminum | |||||
MTBF | 20,000 hrs |
Mechanical Specifications | 225-800 | 225-1000 | |
Travel | 800 mm | 1000 mm | |
Calibrated Accuracy | ±1.5 µm | ±1.5 µm | |
Resolution | 1 nm – 10 nm | 1 nm – 10 nm | |
Repeatability (Bi-Directional) | ±0.5 µm | ±0.5 µm | |
Straightness & Flatness | ±8.5 µm | ±10 µm | |
Pitch & Yaw | 19 arc sec | 23 arc sec | |
Maximum Speed | 2 m/s | ||
Maximum Acceleration | 30 m/s2 | ||
Maximum Force (Continuous) | 150 N | ||
Load Capacity | Horizontal | 100 kg | |
Side | 100 kg | ||
Moving Mass | 8 kg | ||
Stage Mass | 46 kg | 52 kg | |
Material | Aluminum | ||
MTBF | 20,000 hrs |