VXT130-XY

产品详情
VXT系列平台由直线交叉滚子轴承,直线电机,和一个非接触式线性编码器组成。该系列平台采用了中心驱动的方式,采用零齿槽效应的无铁芯电机,以确保平稳地控制速度并进一步提高运行精度。该系列平台具有高速高精度的优良性能。
产品参数

VXT130-XY Series
具有高度集成化的XY直线电机纳米平台
具有纳米级性能并且行程较长
高分辨率(1nm),高重复定位精度(75nm)和高定位精度(250nm)
运动误差小,稳定精度高
具有抗蠕变特性
 
<table class="MsoNormalTable" font-size:14px;width:1170px;"="" style="box-sizing: border-box; margin: 0px; padding: 0px; border-collapse: collapse; border-spacing: 0px; font-family: Arial, &quot;microsoft yahei&quot;, serif; font-size: 14px; color: rgb(63, 63, 63);"> Mechanical Specifications VXT130-160-XY-N VXT130-160-XY-P Travel 160 mm 160 mm Accuracy  ±5 µm ±30s0 nm Resolution  1 nm  1 nm Repeatability (Bi-Directional) ±100 nm  ±75 nm Repeatability (Uni-Directional) ±25 nm ±25 nm Straightness & Flatness  ±2 µm  ±2 µm Pitch 15 arc sec 15 arc sec Yaw 8 arc sec 8 arc sec Orthogonality 10 arc sec 3 arc sec Maximum Speed 350 mm/s 350 mm/s Maximum Acceleration (No Load) 10 m/s2 10 m/s2 In-Position Stability <1 nm <1 nm Maximum Force (Continuous) 22 N Load Capacity  Horizontal 10 kg Moving Mass Upper 2.5 kg 2.5 kg Lower 7.0 kg 7.0 kg Stage Mass 9.0 kg 9.0 kg Material Aluminum Body/Black Hardcoat Finish MTBF(Mean Time Between Failure) 20,000 Hours