{dede:field name='position'/}
 

单轴平台

产品详情
NPX60-223是一款闭环单轴纳米定位台,60μm行程。专门用于体积要求比较紧凑,高速,高刚度,精密定位及扫描应用。
产品参数

Part Number 3715223
Footprint 70mm W x 60mm D x 25mm H
Material Aluminum
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 230g
Nanomotion Control X
Closed-loop Travel 60µm
Open-loop Travel (-30 to 150 V) 90µm
Position Noise 0.2nm
Stiffness 3.7N/µm
Resonant Frequency 1200Hz
Settling Time 4ms
Linearity Deviation 0.01%
Capacitance 2µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400