nPX300

产品详情
nPX300是一个高速闭环纳米定位台,扫描范围300μm,亚纳米分辨率。结构紧凑,适用于空间有限制,并且需要高精度运动控制的应用。
产品参数

Part Number 3715256
Footprint 50mm W x 50mm D x 15mm H
Material Stainless Steel
Maximum Load 1 kg
Max Force (Push/Pull) 100N/20N
Stage Mass 180g
Nanomotion Control X
Closed-loop Travel 300µm
Open-loop Travel (-30 to 150 V) 360µm
Position Noise 1nm
Stiffness 0.3N/µm
Resonant Frequency 440Hz
Settling Time 10ms
Linearity Deviation 0.01%
Capacitance 2.6µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400