nPX600

产品详情
nPX600是一个高速闭环纳米定位台,扫描范围600μm,亚纳米分辨率。结构紧凑,适用于空间有限制,并且需要高精度运动控制的应用。
产品参数

Part Number 3715261
Footprint 60mm W x 60mm D x 15mm H
Material Stainless Steel
Maximum Load 1 kg
Max Force (Push/Pull) 100N/20N
Stage Mass 230g
Nanomotion Control X
Closed-loop Travel 600µm
Open-loop Travel (-30 to 150 V) 700µm
Position Noise 2nm
Stiffness 0.1N/µm
Resonant Frequency 310Hz
Settling Time 25ms
Linearity Deviation 0.01%
Capacitance 6.5µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400