nPFocus100

产品详情
nPFocus100是一款闭环显微物镜纳米定位台,100μm行程。内部采用应变片传感器或者电容传感器保证平台的定位精度。体积紧凑,易于集成到显微镜上。电容传感器版本nPFocus100C (p/n 3715210)。应变片传感器版本为nPFocus100SG (p/n 3715297)。
产品参数

Part Number 3715210 / 3715297
Footprint 63.5mm W 50mm D x 33.5mm H
Material Aluminum & SS
Maximum Load 0.8kg
Max Force (Push/Pull) 100N/10N
Stage Mass 200g
Nanomotion Control Z
Closed-loop Travel 100µm
Open-loop Travel (-30 to 150 V) 160µm
Position Noise 0.3nm / 3nm
Stiffness 0.3N/µm
Resonant Frequency 450Hz
Settling Time 10ms
Linearity Deviation 0.01% / 0.02%
Capacitance 1.3µF
Integrated Sensor Capacitive / Strain Gauge
Cable Length 2m
Controller LC.400