NPZ100-209

产品详情
NPZ100-209 是一款独立的闭环纳米定位台,Z向行程100μm。体积紧凑,易于集成至正置显微镜上。可用于需要Z向精密定位的显微镜中。
产品参数

Part Number 3715209
Footprint 117.5mm W x 108.5mm D x 14mm H
Material Alumninum
Maximum Load 0.3kg
Max Force (Push/Pull) 20N/10N
Stage Mass 100g
Nanomotion Control Z
Closed-loop Travel 100µm
Open-loop Travel (-30 to 150 V) 130µm
Position Noise 3nm
Stiffness 0.2N/µm
Resonant Frequency 400Hz
Settling Time 15ms
Linearity Deviation 0.05%
Capacitance 1.2µF
Integrated Sensor Strain Gauge
Cable Length 2m
Controller LC.400