NPXY100-126

产品详情
NPXY100-126是一款重载超薄大开孔XY扫描台,最大承载5kg,通孔尺寸68mm×68mm,厚度仅为17mm。适用于纳米加工、纳米压印、光学测量、存储科学、材料科学等应用。
产品参数

Part Number 3715126
Footprint 140mm W x 140mm D x 17mm H
Diameter NA
Aperture 68mm W x 68 mm D
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 550g
Nanomotion Control XY
Closed-loop Travel 100µm|100µm
Open-loop Travel (-30 to 150 V) 160µm|160µm
Position Noise 0.3nm|0.3nm
Stiffness 3.3N/µm|3.3N/µm
Resonant Frequency 850Hz|850Hz
Settling Time 5ms|5ms
Linearity Deviation 0.01%|0.01%
Capacitance 4.8µF|4.8µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402