北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
两轴平台
NPXY200-401是一款重载大行程XY扫描台，最大承载5kg，行程200μm×200μm，通孔尺寸68mm×68mm，而厚度仅为17mm。适用于纳米加工、纳米压印、光学测量、存储科学、材料科学等应用。
| Part Number | 3715401 |
| Footprint | 140mm W x 140mm D x 17mm H |
| Diameter | NA |
| Aperture | 68mm W x 68 mm D |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 570g |
| Nanomotion Control | XY |
| Closed-loop Travel | 200µm|200µm |
| Open-loop Travel (-30 to 150 V) | 250µm|250µm |
| Position Noise | 0.7nm|0.7nm |
| Stiffness | 2.1N/µm|2.1N/µm |
| Resonant Frequency | 700Hz|700Hz |
| Settling Time | 8ms|8ms |
| Linearity Deviation | 0.01%|0.01% |
| Capacitance | 7.5µF|7.5µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.402 |
