NPXY200-401

产品详情
NPXY200-401是一款重载大行程XY扫描台,最大承载5kg,行程200μm×200μm,通孔尺寸68mm×68mm,而厚度仅为17mm。适用于纳米加工、纳米压印、光学测量、存储科学、材料科学等应用。
产品参数

Part Number 3715401
Footprint 140mm W x 140mm D x 17mm H
Diameter NA
Aperture 68mm W x 68 mm D
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 570g
Nanomotion Control XY
Closed-loop Travel 200µm|200µm
Open-loop Travel (-30 to 150 V) 250µm|250µm
Position Noise 0.7nm|0.7nm
Stiffness 2.1N/µm|2.1N/µm
Resonant Frequency 700Hz|700Hz
Settling Time 8ms|8ms
Linearity Deviation 0.01%|0.01%
Capacitance 7.5µF|7.5µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402