NPXY300-291

产品详情
NPXY300-291是一款重载大行程XY扫描台,最大承载5kg,行程300μm×300μm,通孔尺寸95mm×85mm,而厚度仅为23mm。适用于纳米加工、纳米压印、光学测量、存储科学、材料科学等应用。
产品参数

Part Number 3715291
Footprint 179mm X 179mm X 23mm H
Diameter NA
Aperture 85mm X 95mm
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 1560g
Nanomotion Control XY
Closed-loop Travel 300µm|300µm
Open-loop Travel (-30 to 150 V) 360µm|360µm
Position Noise 1nm|1nm
Stiffness 0.7N/µm|0.7N/µm
Resonant Frequency 240Hz|240Hz
Settling Time 20ms|20ms
Linearity Deviation 0.01%|0.01%
Capacitance 8.2µF|8.2µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402