nPCube

产品详情
nPCube是一款超小尺寸三维纳米定位台,行程100μm×100μm×100μm,而尺寸仅为40mmx40mmx47mm。适用于光电对准、光电封装、纳米加工、光学测量、纳米自动化等应用。
产品参数

Part Number 3715464
Footprint 40mm W x 40mm D x 47mm H
Material Aluminum/SS
Maximum Load 1.5kg
Max Force (Push/Pull) 15N
Stage Mass 160g
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|100µm
Open-loop Travel (-30 to 150 V) 140µm|140µm|140µm
Position Noise 3nm|3nm|3nm
Stiffness 0.6N/µm|0.6N/µm|0.6N/µm
Resonant Frequency 280Hz|430Hz|280Hz
Settling Time 20ms|20ms|20ms
Linearity Deviation 0.05%|0.05%|0.05%
Capacitance 1.5µF|1.5µF|1.5µF
Integrated Sensor Strain Gauge
Cable Length 2m
Controller LC.403