北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| Part Number | 3715272 |
| Footprint | 37mm W X 37 mm D X 48.3mm H |
| Material | Stainless Steel |
| Maximum Load | 0.5kg |
| Max Force (Push/Pull) | 100N/10N |
| Stage Mass | 290g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 80µm|80µm|5µm |
| Open-loop Travel (-30 to 150 V) | 125µm|125µm|10µm |
| Position Noise | 0.3nm|0.3nm|0.07nm |
| Stiffness | 0.6N/µm|0.5N/µm|7.1N/µm |
| Resonant Frequency | 400Hz|450Hz|2000Hz |
| Settling Time | 10ms|10ms|3ms |
| Linearity Deviation | 0.01%|0.01%|0.5% |
| Capacitance | 1.5µF|1.5µF|2.4µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
