NPXY50Z20-477

产品详情
产品参数

Part Number 3715477
Footprint 60mm W x 60mm D x 31mm H
Material Stainless Steel
Maximum Load 1kg
Max Force (Push/Pull) 100N/10N
Stage Mass 365g
Nanomotion Control XYZ
Closed-loop Travel 50µm|50µm|20µm
Open-loop Travel (-30 to 150 V) 65µm|65µm|35µm
Position Noise 0.2nm|0.2nm|0.1nm
Stiffness 3N/µm|3N/µm|14N/µm
Resonant Frequency 1200Hz|1200Hz|2000Hz
Settling Time 4ms|4ms|2ms
Linearity Deviation 0.01%|0.01%|0.1%
Capacitance 2.8µF|2.8µF|1.6µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403