北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
三轴平台
Part Number | 3715102 |
Footprint | 100mm W x 100mm D x 35mm H |
Diameter | NA |
Aperture | 38mm ∅ |
Material | Aluminum |
Maximum Load | 1kg |
Max Force (Push/Pull) | 100N/10N |
Stage Mass | 560g |
Nanomotion Control | XYZ |
Closed-loop Travel | 100µm|100µm|25µm |
Open-loop Travel (-30 to 150 V) | 130µm|130µm|35µm |
Position Noise | 0.3nm|0.3nm|0.1nm |
Stiffness | 1.3N/µm|1.3N/µm|15.5N/µm |
Resonant Frequency | 500Hz|500Hz|1600Hz |
Settling Time | 8ms|8ms|3ms |
Linearity Deviation | 0.01%|0.01%|0.04% |
Capacitance | 4.8µF|4.8µF|3.1µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.403 |