NPXY100Z10-128

产品详情
NPXY100Z10-128是一款带大口径通孔和高速Z轴的三维纳米扫描台,扫描范围100μm×100μm×10μm,亚纳米分辨率。适用于光学测量、纳米加工、AFM、光存储/磁存储、材料科学等应用。
产品参数

Part Number 3715128
Footprint 140mm W x 140mm D x 30mm H
Diameter NA
Aperture 68mm W x 68mm D
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 870g
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|10µm
Open-loop Travel (-30 to 150 V) 160µm|160µm|15µm
Position Noise 0.3nm|0.3nm|0.1nm
Stiffness 3.0N/µm|3.0N/µm|6.2N/µm
Resonant Frequency 600Hz|600Hz|900Hz
Settling Time 10ms|10ms|5ms
Linearity Deviation 0.01%|0.01%|0.02%
Capacitance 4.8µF|4.8µF|1.0µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403