NPXY100Z25-264

产品详情
NPXY100Z25-264是一款带大通孔和高速Z轴的三维纳米扫描台,扫描范围100μm×100μm×25μm,亚纳米分辨率。适用于光学测量、纳米加工、AFM、光存储/磁存储、材料科学等应用。
产品参数

Part Number 3715264
Footprint 140mm W x 140mm D x 35mm H
Aperture 68mm W x 68mm D
Material Aluminum
Maximum Load 1 kg
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|25µm
Position Noise 0.3nm|0.3nm|0.2nm
Resonant Frequency 600Hz|600Hz|750Hz
Settling Time 10ms|10ms|5ms
Linearity Deviation 0.02%|0.02%|0.02%
Controller LC.403