北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
三轴平台
| Part Number | 3715264 |
| Footprint | 140mm W x 140mm D x 35mm H |
| Aperture | 68mm W x 68mm D |
| Material | Aluminum |
| Maximum Load | 1 kg |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|25µm |
| Position Noise | 0.3nm|0.3nm|0.2nm |
| Resonant Frequency | 600Hz|600Hz|750Hz |
| Settling Time | 10ms|10ms|5ms |
| Linearity Deviation | 0.02%|0.02%|0.02% |
| Controller | LC.403 |
