北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
三轴平台
Part Number | 3715264 |
Footprint | 140mm W x 140mm D x 35mm H |
Aperture | 68mm W x 68mm D |
Material | Aluminum |
Maximum Load | 1 kg |
Nanomotion Control | XYZ |
Closed-loop Travel | 100µm|100µm|25µm |
Position Noise | 0.3nm|0.3nm|0.2nm |
Resonant Frequency | 600Hz|600Hz|750Hz |
Settling Time | 10ms|10ms|5ms |
Linearity Deviation | 0.02%|0.02%|0.02% |
Controller | LC.403 |