北京纳兹精密科技有限公司
BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
| blocking force FB |
> 3.5 N |
| max. normal force FN |
20 N |
| max. lift force FL |
> 1.5 N |
| positioner dimension |
22 x 17 x 8.5 mm3 |
| weight |
13 g |
| pitch torque MP |
0.6 Nm |
| yaw torque MY |
0.6 Nm |
| roll torque MR |
0.4 Nm |
| travel |
± 6 (12) mm |
| step width |
1 – 1,500 nm 1 |
| scan range |
> 1.5 µm |
| scan resolution |
< 1 nm |
| velocity |
> 20 mm/s |
| max. frequency |
18.5 kHz |
| sensor resolution |
4 nm |
| closed loop resolution |
± 500 nm (H)CU |
| repeatability |
± 1 µm (H)CU |
