SLC-1720

产品详情
产品参数

Mechanical Properties
blocking force FB

> 3.5 N

max. normal force FN

20 N

max. lift force FL

> 1.5 N

positioner dimension

22 x 17 x 8.5 mm3

weight

13 g

pitch torque MP

0.6 Nm

yaw torque MY

0.6 Nm

roll torque MR

0.4 Nm


Positioning
travel

± 6 (12) mm

step width

1 – 1,500 nm 1

scan range

> 1.5 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz


Closed-Loop with -L 
sensor resolution

4 nm

closed loop resolution

± 500 nm (H)CU
4 nm MCS

repeatability

± 1 µm (H)CU
± 50 nm MCS