SLC-1730

产品详情
产品参数

Mechanical Properties
blocking force FB

> 3.5 N

max. normal force FN

30 N

max. lift force FL

> 1.5 N

positioner dimension

30 x 17 x 8.5 mm3

weight

20 g

pitch torque MP

1.2 Nm

yaw torque MY

1.2 Nm

roll torque MR

0.6 Nm


Positioning
travel

± 10.5 (21) mm

step width

1 – 1,500 nm 1

scan range

> 1.5 µm

scan resolution

< 1 nm

velocity

> 20 mm/s

max. frequency

18.5 kHz

 
 
Closed-Loop with -S
sensor resolution

1 nm

repeatability

± 30 nm 2

Closed-Loop with -L 
sensor resolution

4 nm

closed loop resolution

± 500 nm (H)CU
4 nm MCS

repeatability

± 1 µm (H)CU
± 60 nm MCS