
北京纳兹精密科技有限公司
        BEIJING NATSU PRECISION TECHNOLOGY CO.LTD
      
| blocking force FB | 
					 > 3.5 N  | 
			
| max. normal force FN | 
					 30 N  | 
			
| max. lift force FL | 
					 > 1.5 N  | 
			
| positioner dimension | 
					 40 x 17 x 8.5 mm3  | 
			
| weight | 
					 26 g  | 
			
| pitch torque MP | 
					 3.0 Nm  | 
			
| yaw torque MY | 
					 3.0 Nm  | 
			
| roll torque MR | 
					 1.0 Nm  | 
			
| travel | 
					 ± 13 (26) mm  | 
			
| step width | 
					 1 – 1,500 nm 1  | 
			
| scan range | 
					 > 1.5 µm  | 
			
| scan resolution | 
					 < 1 nm  | 
			
| velocity | 
					 > 20 mm/s  | 
			
| max. frequency | 
					 18.5 kHz  | 
			
| sensor resolution | 
						 1 nm  | 
				
| repeatability | 
						 ± 40 nm 2  |