VXT130-XY
VZT-I
CRYO LINEAR ACTUATOR (CLA##01)
CRYO POSITIONING STAGE – HIGH RESONANCE (CPSHR)
CRYO BEARING STAGE (CBS)
CRYO STAGE 02 (CS02)
CRYO LINEAR DRIVE (CLD)
CRYO TIP / TILT / PISTON STAGE (CTTPS)
CRYO ROTARY MOTOR (CRM)