CRYO OPTICAL ENCODER (COE)
CRYO VIBRATION ISOLATION PLATFORM (CVIP)
NANO STEPPER ACTUATOR UHV (NSAU)
HEXAPOD FOR HIGH VACUUM OR ULTRA CLEAN
CUSTOM: CRYOGENIC POSITIONING STAGE – HIGH RESONANCE
CUSTOM: CRYO HEXAPOD POSITIONING SYSTEM
CRYO TRANSLATION STAGE (CTS)
CRYO LINEAR ACTUATOR NON MAGNETIC (CLA##02)
PICOSCALE干涉仪控制器